The survival probabilities of muon after penetrating through matters are evaluated analytically by solving the diffusion equation,
taking account of not only bremsstrahlung but also positron-electron pair production and photonuclear interactions, together with ionization loss.
Inaccuracy of probabilities derived by the ordinary saddle point method, reaching to $e/\sqrt{2\pi}\simeq 1.08$, is corrected by applying the complementary-probability method.
Accuracies of the results are discussed by comparing them with those derived by a Monte Carlo method.
